Control of VOCs Emissions by Condenser Pre-treatment in a Semiconductor Fab Abstract The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10 ◦C, it is
Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air Abstract The costly damage trimethylsilanol (TMS) in cleanrooms exacts on scanner lenses in the semiconductor industry has resulted in the demand for accurate and reliable methods for measuring TMS at trace levels (i.e., parts-per-trillion, volume-per-volume of air [pptv] [~ng/m3]. This study
Rapid Determination of TO-15 Volatile Organic Compounds (VOCs) in Air Abstract The following study evaluated the efficacy of using Nutech’s 8900DS preconcentrator in combination with an analytical system based on a 30 m x 0.32 mm x 1.00 µm Rxi-5Sil MS column for analysis of VOCs in whole air. Results were assessed based on five criteria outlined for
Application Note by Using Nutech 2203 Dilutor for Canister Humidification Abstract By using Nutech 2203 Dilutor Liquid Injection function you may do the canister humidification quantitatively and easily. The humidification process will be controlled by computer program and a proprietary adapter is used to make sure the humidification process is going correctly. Introduction USEPA TO-15A and
Application Note by Using Nutech 2104 Canister Clean System for Sample Train Clean and Certification Abstract By Using Nutech 2104 Canister Clean System, users may do the sample train clean and certification at professional way. The 2104 supplies a pure gas fill and vacuum cycles to clean the sample train automatically, and fill the blank gas,
Airborne Molecular Contaminants (AMC) / Volatile Organic Compounds Monitoring for Semiconductor Foundry Clean Room Air ABSTRACT Air samples were collected in consecutive days using Summa canisters from semiconductor foundry clean rooms and air entrances. By coupling a NuTech pre-concentrator with an Agilent GC-MS, an optimized method for qualitative and quantitative analysis of VOC compounds was developed.
Application Note by Using Nutech Preconcentrator System for TX 85 Target Compounds in Lab Analysis Abstract By Using three stage cryogenic preconcentration system + GC/MS technology (Full Scan and/or SIM) 85 TX (TCEQ) target VOC compounds (PAMS+TO-15 Mix by Linde and diluted by our lab) in air will be analyzed in a single run.
Nutech Editor During our communication with customers, we have a quite frequent feedback: what we need is a 3.2L Summa canister and your 3L canister doesn’t meet the requirement. Even worse, some tenders specifically list 3.2L as a must-meet technical specification and in some cases even go further to emphasize this as a plus or eligibility (not eligible
Application Note by Using Nutech Preconcentrator System for PAMS Compounds in Lab Analysis Abstract Using a three-stage cryogenic system + GC/MS technology (Full Scan and/or SIM) 57 PAMS target VOC compounds (PAMS Mix by Linde) in air will be analyzed in a single run performance test. The results show that in 0.5-10.0ppb range the calibration, precision,