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Technical Articles2020-06-11T11:25:32+00:00
2709, 2020

Storage Stability of 66 Volatile Organic Compounds (VOCs) in Silicon-Lined Air Canisters for 30 Days

Storage Stability of 66 Volatile Organic Compounds (VOCs) in Silicon-Lined Air Canisters for 30 Days Abstract The recoveries of 66 volatile organic compounds (VOCs) typically analyzed as part of the United States (U.S.) Environmental Protection Agency’s (EPA’s) Compendium Method TO-15, were evaluated for two commercially available silicon-lined (SL) air canisters. The VOC recoveries were determined both in dry (0%

2509, 2020

Control of VOCs Emissions by Condenser Pre-treatment in a Semiconductor Fab

Control of VOCs Emissions by Condenser Pre-treatment in a Semiconductor Fab   Abstract The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10 ◦C, it is

2509, 2020

Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air

Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air   Abstract The costly damage trimethylsilanol (TMS) in cleanrooms exacts on scanner lenses in the semiconductor industry has resulted in the demand for accurate and reliable methods for measuring TMS at trace levels (i.e., parts-per-trillion, volume-per-volume of air [pptv] [~ng/m3]. This study

2209, 2020

Rapid Determination of TO-15 Volatile Organic Compounds (VOCs) in Air

Rapid Determination of TO-15 Volatile Organic Compounds (VOCs) in Air Abstract The following study evaluated the efficacy of using Nutech’s 8900DS preconcentrator in combination with an analytical system based on a 30 m x 0.32 mm x 1.00 µm Rxi-5Sil MS column for analysis of VOCs in whole air. Results were assessed based on five criteria outlined for time-integrated,

2907, 2020

Application Note by Using Nutech 2203 Dilutor for Canister Humidification

Application Note by Using Nutech 2203 Dilutor for Canister Humidification Abstract By using Nutech 2203 Dilutor Liquid Injection function you may do the canister humidification quantitatively and easily. The humidification process will be controlled by computer program and a proprietary adapter is used to make sure the humidification process is going correctly. Introduction USEPA TO-15A and