Volatile Organic Compounds Monitoring for Semiconductor Foundry Clean Room Air

Volatile Organic Compounds Monitoring for Semiconductor Foundry Clean Room Air ABSTRACT Air samples were collected in consecutive days using Summa canisters from semiconductor foundry clean rooms and air entrances. By coupling a NuTech pre-concentrator with an Agilent GC-MS, an optimized method for qualitative and quantitative analysis of VOC compounds was developed. Method