Nutech Pre-Concentration System for PGME and PGMEA Monitoring in Semiconductor Manufacturing Background As semiconductor manufacturing technology advances towards smaller nodes (e.g., 3nm, 2nm) and high-density integration, the precision and stability of the photolithography process have become critical factors determining chip performance. Propylene Glycol Methyl Ether (PGME) and Propylene Glycol Methyl Ether Acetate (PGMEA), as