Nutech Canister Sampling and Preconcentration System for Detecting VOCs in Semiconductor Cleanrooms

Nutech Canister Sampling and Preconcentration System for Detecting VOCs in Semiconductor Cleanrooms Background With the rapid development of semiconductor process technology, chip linewidths have entered the nanoscale, imposing increasingly stringent environmental requirements on cleanrooms. Gaseous molecular contaminants, known as airborne molecular contaminants (AMCs), which are smaller than particulate pollutants, can penetrate the microstructures of