Storage Stability of 66 Volatile Organic Compounds (VOCs) in Silicon-Lined Air Canisters for 30 Days Abstract The recoveries of 66 volatile organic compounds (VOCs) typically analyzed as part of the United States (U.S.) Environmental Protection Agency’s (EPA’s) Compendium Method TO-15, were evaluated for two commercially available silicon-lined (SL) air canisters. The VOC recoveries were
Control of VOCs Emissions by Condenser Pre-treatment in a Semiconductor Fab Abstract The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around
Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air Abstract The costly damage trimethylsilanol (TMS) in cleanrooms exacts on scanner lenses in the semiconductor industry has resulted in the demand for accurate and reliable methods for measuring TMS at trace levels (i.e., parts-per-trillion, volume-per-volume of air
Rapid Determination of TO-15 Volatile Organic Compounds (VOCs) in Air Abstract The following study evaluated the efficacy of using Nutech’s 8900DS preconcentrator in combination with an analytical system based on a 30 m x 0.32 mm x 1.00 µm Rxi-5Sil MS column for analysis of VOCs in whole air. Results were assessed based on